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Integrated SEM for Dimensional Measurement and Defect Review

An all-in-one system for fully automated measurement, defect detection, and observation of wafer sizes.

VECTOR is an automated SEM system that consolidates three functions necessary for the evaluation of nano devices—dimensional measurement (CD-SEM), defect inspection, and review—into a single platform. With the incorporation of ultra-high precision thermal shields and laser interferometer stages that remain stable even in harsh environments, it maintains excellent positioning accuracy on the nano order in laboratory conditions with vibrations and temperature changes, automatically acquiring thousands of images and data points. It features defect inspection and recipe-based automated workflows, allowing for stable evaluations regardless of the user's experience level. 1. Metrology - Fully automated measurement and observation of full wafer size - Effective for observing patterning trends on wafers and evaluating tolerances 2. SEM Review - KLARF navigation across the entire wafer - Re-detection and observation of high-contrast defects 3. SEM Inspection - Inspection of critical areas through defect detection - AI-based automatic defect detection and classification